Manufacturing structured surface by combining microindentation and ultraprecision cutting

A manufacturing method for structured surfaces by combining microindentation and ultraprecision cutting was proposed. Firstly, microindentation was performed on metal materials, such as oxygen free copper and electroless-plated nickel, to generate micro dimples with curved cross-sectional profiles. Secondly, material pile-ups formed around the micro dimples during microindentation were removed by ultraprecision cutting using diamond tools. Piezo actuated high-speed repetitive microindentation tests were performed, and effects of indentation depth, indentation load, indentation pitch and indenter vibration on dimple form accuracy and surface property were experimentally investigated. Effects of cutting conditions on pile-up removal behavior were examined in the diamond turning process after indentation.