New method for thin-film formation with cryogenic diode and cryogenic target

In this paper we propose a new method to produce thin films by the irradiation of targets using focused ion beams. The starting point is to use the cryogenic targets with or without cryogenic ion diodes. As a first trial, we built a cryogenic target which was cooled by liquid nitrogen and we irradiated the ice-covered target by proton beams. We measured the luminosity of the ablated region to investigate the fundamental processes concerned. The preliminary results are shown here.