Title of article
Development of a high repetition rate Nd:YAG slab laser and soft X-ray generation by cryogenic target
Author/Authors
Amano، نويسنده , , S. and Shimoura، نويسنده , , A. and Miyamoto، نويسنده , , S. and Mochizuki، نويسنده , , T.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1999
Pages
4
From page
423
To page
426
Abstract
High repetition (320 pps), high average power (100 W) pulse Nd:YAG slab laser has been developed for x-ray driver. A strong X-ray emission around 10.8 nm, which wavelength is attractive for x-ray projection lithography, was generated from cryogenic Xe targets pumped by this laser pulses. CO2 and H2O were also tested for cryogenic targets and we found that the emission intensity from Xe around this wavelength region was at least 10 times higher than that from H2O, CO2.
Keywords
LPX , Slab laser , PC-MOPA , Xe cryogenic target
Journal title
Fusion Engineering and Design
Serial Year
1999
Journal title
Fusion Engineering and Design
Record number
2350615
Link To Document