Laser damage of KU-1 quartz glass coated with hydrocarbon films

The effect of high power pulsed YAG:Nd laser radiation on KU-1 quartz glass coated with CH- and CD-films of different thickness and properties has been investigated experimentally. The laser energy densities for film ablation and optical breakdown of glasses coated with the films have been determined. The film cleaning thresholds have been found to be in the range of 0.1–0.3 J/cm2, whereas the optical breakdown thresholds were as high as 50–70 J/cm2. All measurements have been performed in atmosphere.