Er2O3 coating synthesized with MOCVD process on the large interior surface of the metal tube

The electrical insulating coating on the blanket components such as ducts and walls is an attractive concept for reducing the Magneto Hydrodynamic (MHD) pressure drop. Erbium oxide (Er2O3) is a promising candidate coating because of its high stability in liquid lithium and high electrical resistivity according to the results of Er2O3 bulk and Physical Vapor Deposition (PVD) thin film. We have investigated the Metal Organic Chemical Vapor Deposition (MOCVD) process for the large area and complicatedly shaped Er2O3 coating. The Er2O3 insulator coating formation on the various metal disk substrates was successfully carried out. The crystallinity of the Er2O3 coating on the metal substrate increased with the decrease in the surface roughness of the metal substrate and, thus, the crystallinity of the coating can be improved by reducing the roughness of the substrate surface. Furthermore, the Er2O3 coating into the interior surface of the honing SUS pipe, whose interior surface was polished by rotating grinding and brush, was formed stably through the MOCVD process.