Porous silicon based extended-bandwidth rugate filters for mid-infrared application

Porous silicon-based rugate filters operating in the mid-infrared spectral range are fabricated by electrochemical etching of bulk silicon wafers. The rugate filter has a high reflectivity stop-band at 5 μm with no higher-order harmonics and very small sidelobes. Furthermore, broadband high pass filter having the cutoff wavelength in a mid-infrared range is demonstrated by combining five rugate structures.