Effect of natural convection on laser chemical vapor deposition with a stationary laser beam

Effect of natural convection on laser chemical vapor deposition (LCVD) of titanium nitride on a finite slab under irradiation by a stationary laser beam is investigated numerically. Natural convection due to temperature and concentration differences in the gases mixture is modeled and implemented into the thermal model of LCVD. The results show that the effect of natural convection on the shape of deposited film is very insignificant for all cases studied. The effects of laser beam properties and initial pressure of the source gases are also investigated.