Systematic experimental based modeling of a rotary piezoelectric ultrasonic motor

In this paper, a new method for equivalent circuit modeling of a traveling wave ultrasonic motor is presented. The free stator of the motor is modeled by an equivalent circuit containing complex circuit elements. A systematic approach for identifying the elements of the equivalent circuit is suggested. The Levenberg–Marquardt parameter estimation algorithm is used to model the alteration of the admittance after placing the rotor on the stator. Thereafter, theoretical assessments and experimental measurements are used to account for the speed reduction that is caused by placing the rotor on the stator and applying the load torque. Finally, the effects of temperature changes and the resultant response of the motor are computed. Results of the experiments and measurements are used to verify and validate the precision of the new modeling method.