Title of article
Liquid Flow Meter based on a Thermal Anemometer Microsensor
Author/Authors
Sazhin, O Ural Federal University
Pages
6
From page
1991
To page
1996
Abstract
An analytical model of a thermal anemometer sensor is developed. A thermal anemometer microsensor utilizing doped polycrystalline silicon is created. A liquid flow meter prototype based on a thermal anemometer microsensor is designed. Results of the flow meter testing are presented.
Keywords
Thermal flow sensor , Heat mass transfer , Liquid flow meter , MEMS
Journal title
Astroparticle Physics
Serial Year
2016
Record number
2406449
Link To Document