Title of article :
Liquid Flow Meter based on a Thermal Anemometer Microsensor
Author/Authors :
Sazhin, O Ural Federal University
Abstract :
An analytical model of a thermal anemometer sensor is developed. A thermal anemometer microsensor utilizing doped polycrystalline silicon is created. A liquid flow meter prototype based on a thermal anemometer microsensor is designed. Results of the flow meter testing are presented.
Keywords :
Thermal flow sensor , Heat mass transfer , Liquid flow meter , MEMS
Journal title :
Astroparticle Physics
