Title of article :
Effect of Temperature and Gas Flux on the Mechanical Behavior of TiC Coating by Pulsed DC Plasma Enhanced Chemical Vapor Deposition
Author/Authors :
Azadi, M Materials Engineering Department - Faculty of Engineering - Tarbiat Modares University, Tehran, Iran , Sabour Rouhaghdam, A Materials Engineering Department - Faculty of Engineering - Tarbiat Modares University, Tehran, Iran , Ahangarani, S Advanced Materials and Renewable Energies Department - Iranian Research Organization for Science and Technology, Tehran, Iran
Abstract :
There are many factors in coatings process which are effective in changing coatings characteristic such as
voltages, duty cycle, pressure, temperatures and gas flux. In this paper, in plasma enhanced chemical
vapor deposition (PECVD) technique, temperature and gas flux are two important variants which affect
the coatings structure and mechanical properties. All TiC coating deposited on a hot work tool steel (H13)
had a thickness of 2-3 micrometer. The investigation of TiC coatings composition and structure were done
with the grazing incidence XRD, the FTIR (Fourier Transformation Infrared Spectroscopy) and the Field
Emission Scanning Electron Microscopy (FE-SEM). The mechanical properties of the coatings, such as
hardness, wear resistance and surface roughness were studied with Vickers hardness indentation; pin on
disk wear tests and atomic force microscopy, respectively. The best mechanical properties such as a high
hardness (3100 VHN), wear resistance and fracture toughness (11.3MPa. m1/2) and low surface roughness
(18 nm) were related to the coating which was deposited in 450°C.
Farsi abstract :
در تكنيك ترسيب از فاز بخار شيميايي به كمك پلاسما، دما و سرعت شار گازي پارامترهاي مهمي هستند كه بر روي خصوصيات پوشش تأثيرگذار مي باشند. در اين مقاله اثر اين پارامترها بر روي رفتار مكانيكي پوشش كاربيد تيتانيوم بر روي فولاد ابزار بررسي شده است. تركيب و ساختار پوشش كاربيد تيتانيوم با روش‌هاي پراش اشعه ايكس و اسپكتروسكوپي عبوري مادون قرمز فوريه مورد بررسي قرار گرفته اند. خواص مكانيكي پوشش مانند ميكروسختي، مقاومت به سايش، زبري سطحي به ترتيب با دستگاه فرورونده ويكرز، دستگاه سايش پين روي ديسك و ميكروسكوپ نيروي اتمي مطالعه شده است. زماني كه دماي فرايند از 450 تا 490 درجه سانتيگراد كاهش يابد و نسبت شار كلريد تيتانيوم به متان از 1/5 به 6 افزايش يابد، پوشش از خاكستري تيره به نقرهاي تغيير رنگ ميدهد. بهترين خواص مكانيكي مانند سختي بالا (3100 ويكرز)، مقاومت به سايش بالا و زبري سطحي كم، به پوششي مربوط است كه دماي فرايند آن 450 درجه باشد.
Keywords :
TiC , PACVD , Temperature , wear
Journal title :
Astroparticle Physics
