Author/Authors :
Amani Malkeshi, Morasa Department of Chemistry - Science and Research Branch - Islamic Azad University, Tehran , Zare, Karim Department of Chemistry - Science and Research Branch - Islamic Azad University, Tehran , Ghoranneviss, Mahmood , Ghorannevis, Zohreh Department of Physics - Karaj Branch - Islamic Azad University, Karaj , moradi, Omid Department of Chemistry - Shahr Qods Branch - Islamic Azad University, ShahreQods
Abstract :
Using DC-Plasma Enhanced Chemical Vapour Deposition (PECVD) system, the impact of pure Co on
the growth of diamond-like carbon (DLC) nano-structures were investigated. In this study, Acetylene
(C2H2) was diluted in H2 and used as the reaction gas and Cobalt (Co) nano-particles were used as
the catalyst. The effect of preparing Co catalyst at temperatures of 240°C and 350°C and growth
conditions was studied. The results showed that the Co catalyst sputtering at 350°C temperature has
a significant impact on purity, morphology, and synthesized diamond-like carbon nano-structures.
This research was conducted to investigate the effect of catalyst preparation and growth conditions.
Scanning Electron Microscopy (SEM), X-ray diffraction (XRD) and Raman spectroscopy were used to
characterize the diamond-like carbon nano-structures produced under different conditions.
Keywords :
DLC nano-structures , Temperature , DC-PECVD , Catalyst
