Title of article :
A New Model of Pull-in Voltage for MEMS Variable Capacitive with Fully-clamped Diaphragm
Author/Authors :
Azizollah Ganji Bahram Electrical & Computer Engineering Department - Babol University of Technology - Babol, Iran , Gholinezhad Shafagh Sara Electrical & Computer Engineering Department - Babol University of Technology - Babol, Iran
Abstract :
In this paper a new model of Pull-in Voltage for MEMS capacitor with fully clamped diaphragm is presented. This
model not only makes it possible to calculate the exact value of pull-in voltage in a capacitor but also provides the ability
to detect the accurate deflection of a fully clamped diaphragm. By introducing this model, the precise value of pull-in
voltage at the border, between stable and un-stable state, can be calculated. As an advantage of this new achievement,
it is exhibited that the all theoretical equations are fully compatible with simulation results using finite element analysis
(FEA).
Keywords :
strain energy , pull-in voltage , analytical model , fully-clamped diaphragm , MEMS capacitive
Journal title :
Majlesi Journal of Telecommunication Devices
