Title of article :
Modelling of Resonance Frequency of MEMS Corrugated Diaphragm for Capacitive Acoustic Sensors
Author/Authors :
Azizollah Ganji, B. babol noshirvani university of technology - Electrical Computer Engineering Department, بابل, ايران , Taybi, M. babol noshirvani university of technology - Electrical Computer Engineering Department, بابل, ايران
Abstract :
In this paper, a new model for resonance frequency of clamped circular corrugated diaphragm has been presented. First, an analytical analyzes has been carried out to derive mathematic expressions for mechanical sensitivity of diaphragm with residual stress. Next, by using Rayleigh s method we present mathematical model to calculate the resonance frequency of corrugated diaphragm and investigate the effect of residual stress, Young modulus and corrugation numbers on resonance frequency of diaphragm. In this work, MATLAB software for analytical analyzes and Intellisuite MEMS tool for finite element simulation have been used. The analytical and simulated results have been compared together and there is good agreement between them.
Keywords :
Resonance Frequency , Corrugated Diaphragm , Mechanical Sensitivity , Residual Stress
Journal title :
International Journal of Engineering
Journal title :
International Journal of Engineering
