Author/Authors :
Dhahi, T.S. University Malaysia Perlis (UniMAP) - Institute of Nano Electronic Engineering, Malaysia , Hashim, U. Universiti Malaysia Perlis - Institute of Nano Electronic Engineering, Malaysia , Nazwa, T. Universiti Malaysia Perlis - Institute of Nano Electronic Engineering, Malaysia , Kashif, M. University Malaysia Perlis (UniMAP) - Institute of Nano Electronic Engineering, Malaysia , Ali, S.M.U. NED University of Engineering and Technology - Department of Electronic Engineering, Pakistan , Ali, S.M.U. Linköping University - Campus Norrköping - Department of Science and Technology, Sweden
Abstract :
This work demonstrates the fabrication and electrical characterization of microgaps and successfully employed as an electrochemical sensor for the determination of pH and biomolecule. In present work, we have used two (2) mask designs. The first mask is for defining the lateral micro gap and the second mask is for Aluminum (Al) electrode patterning. Lateral microgaps are formed using polysilicon and Al as contact pad electrode. Conventional photolithography is used to fabricate the microgap. The electrical measurements were carried out using Semiconductor Parameter Analyzer to check the capacitance across the microgap and it has been observed that the capacitance is changed as we varied the pH drop wise across the microgap. The measured values of capacitance with respect to each pH concentrations applied during the measurements were repeatable and reproducible.
Keywords :
Microgap , conductivity , pH , capacity , electrochemical sensor.
