Synthesis of Hard Coatings and Nano Modification with Ion Implantation

In this paper, we present the results of a study of TiN films which are deposited by a Physical Vapor Deposition and Ion Beam Assisted Deposition. In the present investigation the subsequent ion implantation was provided with N2+ ions. The ion implantation was applied to enhance the mechanical properties of surface. The film deposition process exerts a number of effects such as crystallographic orientation, morphology, topography, densification of the films. The evolution of the microstructure from porous and columnar grains to denser packed grains is accompanied by changes in mechanical and physical properties. A variety of analytic techniques were used for characterization, such as scratch test, calo test, SEM, AFM, XRD and EDAX. The experimental results indicated that the mechanical hardness is elevated by penetration of nitrogen, whereas the Young’s modulus is significantly elevated