Title of article :
Kesan Halaju Putaran Gilapan Terhadap Peratus Potongan Hujung Sisi Pandu Gelombang Polimer SU-8 di atas Substrat Silikon
Author/Authors :
Ab-Rahman, Mohammad Syuhaimi Universiti Kebangsaan Malaysia - Fakulti Kejuruteraan dan Alam Bina - Jabatan Kejuruteraan Elektrik, Elektronik dan Sistem, Malaysia , Ab Aziz, Fazlinda Universiti Kebangsaan Malaysia - Fakulti Kejuruteraan dan Alam Bina - Jabatan Kejuruteraan Elektrik, Elektronik dan Sistem, Malaysia , Mohd Arif, Noor Azie Azura Universiti Kebangsaan Malaysia - Fakulti Kejuruteraan dan Alam Bina - Jabatan Kejuruteraan Elektrik, Elektronik dan Sistem, Malaysia , Ehsan, Abang Anuar Universiti Kebangsaan Malaysia - Institut Kejuruteraan Mikro dan Nanoteknologi (lMEN) - Makmal Teknologi Fotonik, Malaysia , Jumari, Kasmiran Universiti Kebangsaan Malaysia - Fakulti Kejuruteraan dan Alam Bina - Jabatan Kejuruteraan Elektrik, Elektronik dan Sistem, Malaysia
Abstract :
This research have focused on polishing characterize of polymer based waveguides. The aims of this research are to study how polishing rotation speeds affect the length of cut end face SU-8 polymer on silicon substrate. There are seven sets of rotation velocities which are 50,100,150,200,250,300, and 350 rpm. From the obtained result, it can be concluded that percentage of cut length for each rotation velocity is 0.5 % (50 rpm), 0.6-1.0 % (100 rpm), 3.8 - 4.8 % (150 rpm), 7.7 -10.6% (200 rpm), 15.7 - 18.3% (250 rpm), 25.6 - 27.4 % (300 rpm) and 40.0 -43.7% (350 rpm).
Keywords :
Rotation speed , polymer su , 8 , length of cut , planar waveguide.
