Effect of Methane Flow Rate on the Stoichiometry,Nonstructural and Corrosion Properties of Zr(C,N) FilmsPrepared by Ion Beam Sputtering on AISI Stainless Steel 304

The improvement of corrosion resistance of ZrN1-x Cx films (0 ≤x≤1) on AISI stainlesssteel (SS) 304 is studied as a function of methane flow rate introduced into mixed gas ofargon and nitrogen (Ar+N2). The films were deposited using ion beam sputtering techniqueat 400 C and their corrosion resistance has been investigated via electrochemical test using 0.5 M H2SO4 solution. Scanning electron microscopy (SEM) and X-ray diffraction (XRD)were performed to study the micro and nano-structures of the films. Film stoichiometry was determined by Rutherford backscattering (RBS) technique using SIMNRA and RUMP codes. An average grain size of 7 nm was calculated for deposited films using Scherers fsformula. X-ray diffraction Results showed the presence of a transition crystalline phase from ZrN to ZrC phase corresponding to the formation of ZrN1-x Cx crystalline phase. The electrochemical test revealed that the film corrosion resistance increased with increasing x values. Furthermore, micrographs obtained by SEM did not indicate any damage on the sample surface due to corrosive agent attacks for x 0.6.