Author/Authors :
Isaev, T.F. Department of Mathematics and Statistics, Dhahran, Saudi Arabia , Kochikov, I.V. Research Computing Center - Lomonosov Moscow State University, Moscow, Russia , Lukyanenko, D.V. Department of Mathematics and Statistics, Dhahran, Saudi Arabia , Tikhonravov, A.V. Research Computing Center - Lomonosov Moscow State University, Moscow, Russia , Yagola, A.G. Department of Mathematics and Statistics, Dhahran, Saudi Arabia
Abstract :
Production of the modern advanced multi-layer optical coatings requires on-line
monitoring of the growing layer thickness. We present regularizing algorithms for the contin-
uous on-line determination of the deposited layer thickness that can be used in the coating
production with broadband optical monitoring. These algorithms are based on minimization
of the Tikhonov functional as well as on the allocation of the correctness set. Numerical
experiments confirm the effectiveness of the proposed algorithms.
Keywords :
inverse problems in optics , regularizing algorithm , thin films , broadband optical monitoring