Title of article
REGULARIZING ALGORITHMS FOR THE DETERMINATION OF THICKNESS OF DEPOSITED LAYERS IN OPTICAL COATING PRODUCTION
Author/Authors
Isaev, T.F. Department of Mathematics and Statistics, Dhahran, Saudi Arabia , Kochikov, I.V. Research Computing Center - Lomonosov Moscow State University, Moscow, Russia , Lukyanenko, D.V. Department of Mathematics and Statistics, Dhahran, Saudi Arabia , Tikhonravov, A.V. Research Computing Center - Lomonosov Moscow State University, Moscow, Russia , Yagola, A.G. Department of Mathematics and Statistics, Dhahran, Saudi Arabia
Pages
10
From page
38
To page
47
Abstract
Production of the modern advanced multi-layer optical coatings requires on-line
monitoring of the growing layer thickness. We present regularizing algorithms for the contin-
uous on-line determination of the deposited layer thickness that can be used in the coating
production with broadband optical monitoring. These algorithms are based on minimization
of the Tikhonov functional as well as on the allocation of the correctness set. Numerical
experiments confirm the effectiveness of the proposed algorithms.
Keywords
inverse problems in optics , regularizing algorithm , thin films , broadband optical monitoring
Journal title
Eurasian Journal of Mathematical and Computer Applications
Serial Year
2018
Record number
2602014
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