Title of article :
Simulation Study of Sputtering Yield of Zn Target Bombarded By Xenon Ions
Author/Authors :
ebrahiem, samira a. university of baghdad - college of education for pure science (ibn al – haitham) - dept. of physics, Iraq , hady, firas m. university of baghdad - college of education for pure science (ibn al – haitham) - dept. of physics, Iraq , jassim, mustafa k. university of baghdad - college of education for pure science (ibn al-haitham) - dept of physics, Iraq , tawfeek, huda m. university of baghdad - college of education for pure science (ibn al – haitham) - dept. of physics, Iraq
Abstract :
Using a reduction of TRIM simulation data, the sputtering yield behaviour of Zinc target bombard by heavy Xenon ions plasma is studied. The sputtering yield as a function of Zinc layer width, Xenon ion number, energy of ions, and the angle of ion incidence are calculated and illustrated graphically. The corresponding energy loss due to ionization, vacancies and phonons, are graphically shown and discussed. Further, we fit the calculations and expressions for fitted curves are presented with its coefficients
Keywords :
TRIM program , sputtering yield , Xenon ions , Zinc
Journal title :
Ibn Alhaitham Journal For Pure and Applied Science
Journal title :
Ibn Alhaitham Journal For Pure and Applied Science
