Author/Authors :
Wei, Zheng College of Mechanical and Electrical Engineering - Beijing University of Chemical Technology - Beijing , China , Sun, Yan College of Mechanical and Electrical Engineering - Beijing University of Chemical Technology - Beijing , China , Liu, Jing College of Mechanical and Electrical Engineering - Beijing University of Chemical Technology - Beijing , China , Wang, Kejian College of Mechanical and Electrical Engineering - Beijing University of Chemical Technology - Beijing , China
Abstract :
During the operation of tapping mode atomic force microscope (TM-AFM), the gap between the cantilever and sample surface isvery small (several nanometers to micrometers). Owing to the small gap distance and high vibration frequency, squeezefilm forceshould be considered in TM-AFM. To explore the mechanism of squeezefilm damping in TM-AFM, three theoreticalmicrocantilever simplified models are discussed innovatively herein: tip probe, ball probe, and tipless probe. Experiments andsimulations are performed to validate the theoretical models. It is of great significance to improve the image quality of atomicforce microscope
Keywords :
Squeeze Film Damping Effect , Different Microcantilever Probes , Tapping Mode Atomic Force Microscope , TM-AFM
