Author/Authors :
Hu, Xiaotang State Key Laboratory of Precision Measurement Technology & Instruments - Tianjin University - Tianjin 300072, China , Liu, Lu State Key Laboratory of Precision Measurement Technology & Instruments - Tianjin University - Tianjin 300072, China , Xu, Jianguo State Key Laboratory of Precision Measurement Technology & Instruments - Tianjin University - Tianjin 300072, China , Zhang, Rui State Key Laboratory of Precision Measurement Technology & Instruments - Tianjin University - Tianjin 300072, China , Wu, Sen State Key Laboratory of Precision Measurement Technology & Instruments - Tianjin University - Tianjin 300072, China , Hu, Xiaodong State Key Laboratory of Precision Measurement Technology & Instruments - Tianjin University - Tianjin 300072, China
Abstract :
Thisarticlepresentsanatomicforcemicroscopy(AFM)techniquefortruethree-dimensional(3D)characterization.Thecantileverprobewithflaredtipwasusedinahome-made3D-AFMsystem.Thecantileverwasdrivenbytwoshakingpiezoceramicsandoscillatedarounditsverticalortorsionalresonancefrequency.Theverticalresonancemodewasusedforuppersurfaceimaging,andthetorsionalresonancemodewasusedforsidewalldetecting.The3D-AFMwasappliedtomeasurestandardgratingswiththeheightof100nmand200nm.Theexperimentresultsshowedthatthepresented3D-AFMtechniquewasabletodetectthesmalldefectfeaturesonthesteepsidewallandtoreconstructthe3Dtopographyofthemeasuredstructure.
Keywords :
Three-Dimensional Atomic Force Microscopy , Sidewall Imaging , Torsional Resonance Mode , AFM
