Author/Authors :
Kim, Kwang Ho School of Convergence Science - Pusan National University - Busan , Republic of Korea , Ding, Ji Cheng School of Convergence Science - Pusan National University - Busan , Republic of Korea , Kang, Myung Chang School of Convergence Science - Pusan National University - Busan , Republic of Korea , Zhang, Teng Fei Global Frontier R&D Center for Hybrid Interface Materials - Pusan National University - Busan , Republic of Korea , Wan, Zhi Xin The Institute of Materials Technology - Pusan National University - Busan , Republic of Korea , Mei, Hai Juan School of Electromechanical Engineering - Guangdong University of Technology - Guangzhou , China , Wang, Qi Min School of Electromechanical Engineering - Guangdong University of Technology - Guangzhou , China
Abstract :
The Cr-Cu-N coatings with various Cu contents (0–25.18 (±0.17) at.%) were deposited on Si wafer and stainless steel (SUS304) substrates in reactive Ar+N2gas mixture by a hybrid coating system combining pulsed DC and RF magnetron sputteringtechniques. The influence of Cu content on the coating composition, microstructure, and mechanical properties was investigated.The microstructure of the coatings was significantly altered by the introduction of Cu. The deposited coatings exhibit solid solutionstructure with different compositions in all of the samples. Addition of Cu is intensively favored for preferred orientation growthalong (200) direction by restricting in (111) direction. With increasing Cu content, the surface and cross-sectional morphologyof coatings were changed from triangle cone-shaped, columnar feature to broccoli-like and compact glassy microstructure,respectively. The mechanical properties including the residual stress, nanohardness, and toughness of the coatings were exploredon the basis of Cu content. The highest hardness was obtained at the Cu content of 1.49 (±0.10) at.%.
Keywords :
Influence , Cu Content , Microstructure , Mechanical Properties , Cr-Cu-N Coatings
