Recent Advances on In Situ SEM Mechanical and Electrical Characterization of Low-Dimensional Nanomaterials

In the past decades, in situ scanning electron microscopy (SEM) has become a powerful technique for the experimental study oflow-dimensional (1D/2D) nanomaterials, since it can provide unprecedented details for individual nanostructures upon mechanicaland electrical stimulus and thus uncover the fundamental deformation and failure mechanisms for their device applications. Inthis overview, we summarized recent developments on in situ SEM-based mechanical and electrical characterization techniquesincluding tensile, compression, bending, and electrical property probing on individual nanostructures, as well as the state-of-the-art electromechanical coupling analysis. In addition, the advantages and disadvantages of in situ SEM tests were also discussed withsome possible solutions to address the challenges. Furthermore, critical challenges were also discussed for the development anddesign of robust in situ SEM characterization platform with higher resolution and wider range of samples. These experimental effortshave offered in-depth understanding on the mechanical and electrical properties of low-dimensional nanomaterial components andgiven guidelines for their further structural and functional applications