Author/Authors :
Tan, Min State Key Laboratory of Management and Control for Complex Systems - Institute of Automation - Chinese Academy of Sciences - Beijing, China , Zhou, Chao State Key Laboratory of Management and Control for Complex Systems - Institute of Automation - Chinese Academy of Sciences - Beijing, China , Cheng, Long State Key Laboratory of Management and Control for Complex Systems - Institute of Automation - Chinese Academy of Sciences - Beijing, China , Cao, Zhiqiang State Key Laboratory of Management and Control for Complex Systems - Institute of Automation - Chinese Academy of Sciences - Beijing, China , Wang, Shuo State Key Laboratory of Management and Control for Complex Systems - Institute of Automation - Chinese Academy of Sciences - Beijing, China , Deng, Lu School of Statistics and Mathematics - Central University of Finance and Economics - Beijing, China
Abstract :
In the motion of probing nanostructures, repeating position and movement is frequently happing and tolerance for position erroris stringent. The consistency between the axis of manipulators and image is very significant since the visual servo is the mostimportant tool in the automated manipulation. This paper proposed an automated axis alignment method for a nanomanipulatorinside the SEM by recognizing the position of a closed-loop controlling the end-effector, which can characterize the relationshipof these two axes, and then the rotation matrix can be calculated accordingly. The error of this method and its transfer functionare also calculated to compare the iteration method and average method. The method in this paper can accelerate the process ofaxis alignment to avoid the electron beam induced deposition effect on the end tips. Experiment demonstration shows that it canachieve a 0.1-degree precision in 90 seconds
Keywords :
Automated Axis Alignment , Nanomanipulator inside , SEM , Its Error Optimization
