Author/Authors :
Fukuda, Toshio Intelligent Robotics Institute - Beijing Institute of Technology - Beijing 100081, China , Yu, Ning Intelligent Robotics Institute - Beijing Institute of Technology - Beijing 100081, China , Shi, Qing Intelligent Robotics Institute - Beijing Institute of Technology - Beijing 100081, China , Wang, Huaping Intelligent Robotics Institute - Beijing Institute of Technology - Beijing 100081, China , Huang, Qiang Intelligent Robotics Institute - Beijing Institute of Technology - Beijing 100081, China , Nakajima, Masahiro Department of Micro-Nano Systems Engineering - Nagoya University - Nagoya 464-0814, Japan , Yang, Zhan Robotics and Microsystem Center - Soochow University - Suzhou 215006, China , Sun, Lining Robotics and Microsystem Center - Soochow University - Suzhou 215006, China
Abstract :
A high contact resistance restricts the application of carbon nanotubes (CNTs) in fabrication of field-effect transistors (FETs). Thus,it is important to decrease the contact resistance and investigate the critical influence factors such as the contact length and contactforce. This study uses nanomanipulation to characterize both the resistance and the force at a CNT/Au side-contact interface insidea scanning electron microscopy (SEM). Two-terminal CNT manipulation methods, and models for calculating the resistance andforce at contact area, are proposed to guide the measurement experiments of a total resistance and a cantilever’s elastic deformation.The experimental results suggest that the contact resistance of CNT/Au interface is large (189.5 kΩ) when the van der Waals force(282.1 nN) dominates the contact force at the interface. Electron-beam-induced deposition (EBID) is then carried out to decreasethe contact resistance. After depositing seven EBID points, the resistance is decreased to 7.5 kΩ, and the force increases to 1339.8 nNat least. The resistance and force at the contact area where CNT was fixed exhibit a negative exponential correlation before andafter EBID. The good agreement of this correlation with previous reports validates the proposed robotic system and methods forcharacterizing the contact resistance and force
Keywords :
Characterization , Resistance , Force , CarbonNanotube/Metal Side Contact , Nanomanipulation , CNTs , FETs
