Calculation of Effective Molecules Collision Frequency and Cross-Sectional Ratio for Electromagnetic Discharge in Various Gases Mixtures

Estimation of gases quantities in gases mixture in plasma were accomplished at 300K. Eachmixture has an effective value of the molecular collision frequency, electro-ions collision frequencyand collision cross-sectional ratio. The computational and experimental results are correlated. Inthis work, the concept of separate control ion energy and ion flux by the two frequencies worksgenerally well for the investigated discharge setup. The high frequency mainly determines ion fluxand radical formation in the mixture discharges while ion energies are strongly influenced by thelow frequency. Deviations from an ideally separated control of ion flux and energy are caused byinfluences on discharge parameters and interaction between the two frequencies since the radiofrequency (RF) power sources are coupled to each other in the current setup.