Title of article
Optical Waveguides In BenzoC yclob utene (BCB 4024-40) Po lymer
Author/Authors
Ibrahim, Mohd Haniff Universiti Teknologi Malaysia - Faculty of Electrical Engineering, Photonics Technology Centre, Malaysia , Kassim, Norazan Mohd Universiti Teknologi Malaysia - Faculty of Electrical Engineering, Photonics Technology Centre, Malaysia , Mohammad, Abu Bakar Universiti Teknologi Malaysia - Faculty of Electrical Engineering, Photonics Technology Centre, Malaysia , Chin, Mee-Koy Nanyang Technological University - Photonics Research Center, Singapore , Lee, Shuh-Ying Nanyang Technological University - Photonics Research Center, Singapore
From page
49
To page
56
Abstract
The fabrication and characterization processes of single mode optical waveguide based on photosensitive BenzoCyclobutene (BCB4024-40) polymer are described. The polymer film thickness for various coating speed and refractive index are measured by the method of prism coupling. The waveguide is fabricated using the photolithography and chemical etching technique on BK7 glass substrate with a thin layer of SiO2 as cover. The waveguide loss is measured using the conventional cut back method which results on an average loss of 3.5 dB/cm.
Keywords
BenzoCyclobutene polymer , spin coating technique , chemical etching technique , prism coupling , cutback method
Journal title
Jurnal Teknologi :F
Journal title
Jurnal Teknologi :F
Record number
2715567
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