Title of article :
Adjustable Resonance Frequency of RF-MEMS Capacitor by Using Comb- Drive Actuators: A Design Approaches
Author/Authors :
Tamsir, Agus Santoso university of indonesia - Department of Electrical Engineering, MinaEMS-RG (Micro-Nano Electro-Mechanical System-Research Group), Indonesia , Wijaya, Sandy Tannu university of indonesia - Faculty of Engineering - Department of Electrical Engineering, Indonesia , Majlis, Dato’ Burhanuddin Yeop Universiti Kebangsaan Malaysia - Institute of Microengineering and Nanoelectronics, Malaysia
Abstract :
The needs of smaller size RF varactor is a must today, and MEMS comes to be the potential one. In this paper we proposed an adjustable resonance RF-MEMS varactor by using comb-drive actuators placing in each side of the square movable plate. In our preliminary simulation, we found that the device can work properly but some constraints comes such as the dominancies of harmonic resonance frequencies that influences into the nominal capacitances. Therefore for the next step of development we have to find out the window of the structural dimension for a certain spans and a certain operating frequencies.
Keywords :
capacitor , comb , drive actuators , resonance frequencies , RF , MEMS varactor
Journal title :
Makara Journal Of Technology
Journal title :
Makara Journal Of Technology
