Synthesis and Study of ZnO Thin Films Using CVD Technique For Waveguide Sensor Applications

Zinc oxide was deposited on the glass substrate as a waveguide sensor by chemical vapor deposition technique. The structure, surface morphology and optical properties of ZnO thin films are characterized using X-ray diffraction, binding energy SEM , UV- spectrophotometer, Raman spectroscope and Photoluminescence (PL). The results show that the waveguide sensor of ZnO offers a good response to detect different concentrations of glucose solution. The maximum sensitivity has been determined as 1.09 dB at 560 nm thickness of ZnO layer, while the minimum sensitivity was found to be 0.79 dB, 0.87 dB and 0.96 dB at thickness 213 nm, 315 nm and 435 nm respectively. It is believed that the ZnO material has a great potential to be utilized as a sensing layer in real world applications for the detection of chemicals leakage. In this work, the ZnO was deposited on the glass substrate as waveguide sensor by CVD method. Different thickness of ZnO layers are deposited on the glass substrate. The waveguide sensor was combined with laser source and photo-detector to detect different concentrations of glucose. it was showed a good response toward the change of the glucose concentration, which will be used to detect the chemical leakage in fuel station, wells and pipeline oil.