Title of article
Design of a dedicated parallel processor for the simulation of the photolithography process using a genetic algorithm
Author/Authors
Ioannis Karafyllidis Preview PDF (439 K) ، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1999
Pages
17
From page
411
To page
427
Keywords
Photolithography , Dedicated processors , cellular automata , Genetic algorithms
Journal title
Engineering Applications of Artificial Intelligence
Serial Year
1999
Journal title
Engineering Applications of Artificial Intelligence
Record number
301565
Link To Document