The optical measurement station for complex testing of microelements

The paper presents a concept of optical measurement station for complex testing of microelements including MEMS, MOEMS and electronic components and assemblies. The wide selection of examples proves that the specific measurement requirements are fulfilled by alternative usage of combined conventional and grating interferometers CI/GI (reflective surfaces), in-plane and out-of-plane ESPI (scattering surfaces) and digital holographic interferometry DHI (mixed surfaces) supported by thermovision. All these methods are realized by integrated microinterferometer (IWaM) based on a glass waveguide or air cavity waveguide arrangements. The air cavity IWaM allows to form a thermal output for combined thermovision CI/GI or ESPI measurements. IWaM has a compact design insensitive to mechanical vibrations and may be easily rearranged to work with the selected measurement techniques. It is also fully integrated with an optical microscope and it is designed to work both in laboratories and in production environments.