• Title of article

    Photoelectric automatic focusing system based on interference

  • Author/Authors

    Zhang، Y.M. نويسنده , , Liu، T.G. نويسنده , , Cai، H.Y. نويسنده , , Zhang، F.L. نويسنده , , Lessard، R.A. نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2001
  • Pages
    -344
  • From page
    345
  • To page
    0
  • Abstract
    The principle and the method of a new automatic focusing system are presented in this paper. The system is constructed relying on the relationship between laser wave interference patterns and defocusing displacement. A CCD linear array receives interference patterns in the form of light intensity, which are converted into digital signals afterwards. Then the computer controls a stepping motor to complete auto-focusing process according to the digital results. The system has been applied in a kind of film resolution testing instrument and it shows that it has the advantage of high accuracy, high speed and wide applications.
  • Keywords
    Silicon oxinitride , Amorphous thin films , Non-linear optical method of investigations , Optical second harmonic generation
  • Journal title
    OPTICS & LASERS IN ENGINEERING
  • Serial Year
    2001
  • Journal title
    OPTICS & LASERS IN ENGINEERING
  • Record number

    30264