Title of article
Photoelectric automatic focusing system based on interference
Author/Authors
Zhang، Y.M. نويسنده , , Liu، T.G. نويسنده , , Cai، H.Y. نويسنده , , Zhang، F.L. نويسنده , , Lessard، R.A. نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2001
Pages
-344
From page
345
To page
0
Abstract
The principle and the method of a new automatic focusing system are presented in this paper. The system is constructed relying on the relationship between laser wave interference patterns and defocusing displacement. A CCD linear array receives interference patterns in the form of light intensity, which are converted into digital signals afterwards. Then the computer controls a stepping motor to complete auto-focusing process according to the digital results. The system has been applied in a kind of film resolution testing instrument and it shows that it has the advantage of high accuracy, high speed and wide applications.
Keywords
Silicon oxinitride , Amorphous thin films , Non-linear optical method of investigations , Optical second harmonic generation
Journal title
OPTICS & LASERS IN ENGINEERING
Serial Year
2001
Journal title
OPTICS & LASERS IN ENGINEERING
Record number
30264
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