Title of article
IR laser induced decomposition of tetrakis(dimethylamido)titanium for chemical vapor deposition of TiNx
Author/Authors
M. Janovska، نويسنده , , Z. Bastl، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1996
Pages
5
From page
727
To page
731
Journal title
Infrared Physics & Technology
Serial Year
1996
Journal title
Infrared Physics & Technology
Record number
327479
Link To Document