• Title of article

    Groove depth dependence of IR transmission spectra through silicon gratings: experiment versus theory

  • Author/Authors

    Shlomo Hava، نويسنده , , Mark Auslender، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2000
  • Pages
    6
  • From page
    149
  • To page
    154
  • Keywords
    Gratings modeling , IR transmission , FTIR spectrometry , Silicon micromachining , Di?raction gratings
  • Journal title
    Infrared Physics & Technology
  • Serial Year
    2000
  • Journal title
    Infrared Physics & Technology
  • Record number

    327657

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=327657