• Title of article

    Fabrication of plastic microlens array using gas-assisted micro-hot-embossing with a silicon mold

  • Author/Authors

    C.-Y. Chang، نويسنده , , S.-Y. Yang، نويسنده , , L.-S. Huang، نويسنده , , J.-H. Chang، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2006
  • Pages
    11
  • From page
    163
  • To page
    173
  • Keywords
    Gas-assisted micro-hot-embossing , Hot embossing , Deep reactive ion etching , Replication , Microlens array , Silicon mold
  • Journal title
    Infrared Physics & Technology
  • Serial Year
    2006
  • Journal title
    Infrared Physics & Technology
  • Record number

    328026

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=328026