مرکز منطقه ای اطلاع رساني علوم و فناوري - Design and performance of an excimer-laser based optical system for high precision microstructuring

Title of article :

Design and performance of an excimer-laser based optical system for high precision microstructuring

Author/Authors :

K. -H. Gerlach، نويسنده , , J. Jersch، نويسنده , , K. Dickmann and L. J. Hildenhagen، نويسنده ,

Issue Information :

روزنامه با شماره پیاپی سال 1997

Pages :

From page :

439

To page :

447

Keywords :

beam conditioning optics , Excimer lasers , rnicrostructuring

Journal title :

OPTICS & LASER TECHNOLOGY

Serial Year :

1997

Journal title :

OPTICS & LASER TECHNOLOGY

Record number :

334632

Link To Document :