Title of article
Analysis of the Al content in semiconductor materials by null ellipsometric spectrometry
Author/Authors
Jie Lian، نويسنده , , Qingpu Wang، نويسنده , , Aijian Wei، نويسنده , , Yurong Wang and Ping Li، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2002
Pages
4
From page
493
To page
496
Keywords
Ellipsometric spectrum , linear interpolation , The content of aluminum , E:ective medium approximate
Journal title
OPTICS & LASER TECHNOLOGY
Serial Year
2002
Journal title
OPTICS & LASER TECHNOLOGY
Record number
334855
Link To Document