Title of article
Sub-nanometric precision displacement sensing using low mass and rough surfaces as movable targets
Author/Authors
Manohar Virdee، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2004
Pages
9
From page
107
To page
115
Keywords
Displacement sensing , Sub-nanometric resolutions , Low mass targets and suitable in hostile environments , Non-contacting , Phase quadrature , Nanometricprecision , Rough and retro-re4ecting surfaces
Journal title
OPTICS & LASER TECHNOLOGY
Serial Year
2004
Journal title
OPTICS & LASER TECHNOLOGY
Record number
335019
Link To Document