Title of article
Surface roughness investigation of semi-conductor wafers
Author/Authors
C. J. Tay، نويسنده , , S. H. Wang، نويسنده , , C. Quan، نويسنده , , B. L. Ng and K. C. Chan، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2004
Pages
5
From page
535
To page
539
Keywords
Atomic force microscope (AFM , light scattering , Non-contact measurement , Total integrated scattering (TIS) , Surface roughness
Journal title
OPTICS & LASER TECHNOLOGY
Serial Year
2004
Journal title
OPTICS & LASER TECHNOLOGY
Record number
335091
Link To Document