• Title of article

    Study on actuating voltage and switching time of a MOEMS optical switch

  • Author/Authors

    Dongming Sun، نويسنده , , Wei Dong، نويسنده , , Wenbin Guo، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2005
  • Pages
    7
  • From page
    601
  • To page
    607
  • Keywords
    Electrostatic actuated , Torsion beam , MOEMS , Slant lower electrode , Actuating voltage , Switching time
  • Journal title
    OPTICS & LASER TECHNOLOGY
  • Serial Year
    2005
  • Journal title
    OPTICS & LASER TECHNOLOGY
  • Record number

    335214