Title of article :
A novel method for measuring the coma of a lithographic projection system by use of mirror-symmetry marks
Author/Authors :
Dongqing Zhang، نويسنده , , Xiangzhao Wang، نويسنده , , Weijie Shi and Fan Wang، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2007
Pages :
4
From page :
922
To page :
925
Keywords :
Coma , Lithographic tool , Projection system
Journal title :
OPTICS & LASER TECHNOLOGY
Serial Year :
2007
Journal title :
OPTICS & LASER TECHNOLOGY
Record number :
335467
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=335467
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