Title of article
Investigation of pupil-fill factors as process window indicators for dry optical lithography
Author/Authors
Jeun Kee Chua، نويسنده , , Vadakke Matham Murukeshan، نويسنده , , Sia Kim Tan and Qun Ying Lin، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2008
Pages
14
From page
142
To page
155
Keywords
Dry optical lithography , Process window , Intensity attenuated phase shifting
Journal title
OPTICS & LASER TECHNOLOGY
Serial Year
2008
Journal title
OPTICS & LASER TECHNOLOGY
Record number
335591
Link To Document