مرکز منطقه ای اطلاع رساني علوم و فناوري - A 2-D model that accounts for 3-D fringing in MEMS devices

Title of article :

A 2-D model that accounts for 3-D fringing in MEMS devices

Author/Authors :

Krishnan Suresh and Murari Sinha، نويسنده ,

Issue Information :

روزنامه با شماره پیاپی سال 2005

Pages :

From page :

963

To page :

970

Keywords :

MEMS , Dimensional reduction , Fringing , CAD

Journal title :

Engineering Analysis with Boundary Elements

Serial Year :

2005

Journal title :

Engineering Analysis with Boundary Elements

Record number :

348860

Link To Document :