مرکز منطقه ای اطلاع رساني علوم و فناوري - The mechanical strength of polysilicon films: Part 2. Size effects associated with elliptical and circular perforations

Title of article :

The mechanical strength of polysilicon films: Part 2. Size effects associated with elliptical and circular perforations

Author/Authors :

Ioannis Chasiotis، نويسنده , , Wolfgang G. Knauss، نويسنده ,

Issue Information :

روزنامه با شماره پیاپی سال 2003

Pages :

From page :

1551

To page :

1572

Keywords :

Micronotches , Specimen size e)ects , Weibull analysis , Failure strength , Polysilicon , MEMS

Journal title :

Journal of the Mechanics and Physics of Solids

Serial Year :

2003

Journal title :

Journal of the Mechanics and Physics of Solids

Record number :

354639

Link To Document :