مرکز منطقه ای اطلاع رساني علوم و فناوري - Membrane; Indentation; Thin $lm; Nanoindentation; Nanoscale testing

Title of article :

Membrane; Indentation; Thin $lm; Nanoindentation; Nanoscale testing

Author/Authors :

Yanhang Zhang and Martin L. Dunn، نويسنده ,

Issue Information :

روزنامه با شماره پیاپی سال 2004

Pages :

From page :

2101

To page :

2126

Keywords :

stress relaxation , Geometric nonlinearity , MicroelectrochemicalSystems (MEMS) , Creep , Thin יlm bilayer

Journal title :

Journal of the Mechanics and Physics of Solids

Serial Year :

2004

Journal title :

Journal of the Mechanics and Physics of Solids

Record number :

354750

Link To Document :