Title of article :
Imaging, spectroscopy and spectroscopic imaging with an energy filtered field emission TEM
Author/Authors :
G. A. Botton ، نويسنده , , M. W. Phaneuf، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 1999
Pages :
11
From page :
109
To page :
119
Keywords :
spatial resolution , Semiconductor devices , Dielectric layers , O–N–O , Grainboundaries , Segregation , Field emission transmission electron microscopy , Focussed ion beam , elemental mapping , Energy filtered microscopy , Near-edge structure
Journal title :
Micron
Serial Year :
1999
Journal title :
Micron
Record number :
356770
Link To Document :
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