Title of article :
Electron energy loss spectroscopy study of the formation process of Si nanocrystals in SiO2 due to electron stimulated desorption-decomposition
Author/Authors :
M. Takeguchi، نويسنده , , K. Furuya ، نويسنده , , K. Yoshihara، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 1999
Pages :
4
From page :
147
To page :
150
Keywords :
Si , SiO2 , Electron energy lossspectroscopy , Electron stimulated desorption , nanocrystals , Ultrahigh-vacuum field-emission transmission electron microscope
Journal title :
Micron
Serial Year :
1999
Journal title :
Micron
Record number :
356775
Link To Document :
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