Title of article
Dual-column (FIB–SEM) wafer applications
Author/Authors
Robert Krueger، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1999
Pages
6
From page
221
To page
226
Keywords
scanning electron microscope , Focused ion beam , Defect characterization , Metal deposition , TEM sample preparation , Dual-column
Journal title
Micron
Serial Year
1999
Journal title
Micron
Record number
356783
Link To Document