Title of article :
The use of Auger spectroscopy and a quadrupole SIMS build on a focused ion beam to examine focused ion beam made cross-sections
Author/Authors :
D. Verkleij ، نويسنده , , C. Mulders، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 1999
Keywords :
Auger , Focused ion beam , SIMS , Integrated circuits , Failure analysis
