• Title of article

    The use of Auger spectroscopy and a quadrupole SIMS build on a focused ion beam to examine focused ion beam made cross-sections

  • Author/Authors

    D. Verkleij ، نويسنده , , C. Mulders، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 1999
  • Pages
    8
  • From page
    227
  • To page
    234
  • Keywords
    Auger , Focused ion beam , SIMS , Integrated circuits , Failure analysis
  • Journal title
    Micron
  • Serial Year
    1999
  • Journal title
    Micron
  • Record number

    356784

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=356784