• Title of article

    Width determination of SiO2-films in Si-based devices using low-loss EFTEM: image contrast as a function of sample thickness

  • Author/Authors

    Bernhard Schaffer and Michael Toth ، نويسنده , , Werner Grogger، نويسنده , , Ferdin، نويسنده , , Hofer، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2003
  • Pages
    7
  • From page
    1
  • To page
    7
  • Keywords
    Silicon dioxide , Electron energy-loss spectroscopy , Energy filtering transmission electron microscopy , Silicon , thin films , Material contrast
  • Journal title
    Micron
  • Serial Year
    2003
  • Journal title
    Micron
  • Record number

    357051

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=357051